About this scholarly article

SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Modeling scanner signatures in the context of OPC by Zhang, Qiaolin; Naber, Robert J.; Kawahira, Hiroichi; Tyminski, Jacek K.; Lucas, Kevin is a scholarly article available to read on EtoBox.

Author

Zhang, Qiaolin; Naber, Robert J.; Kawahira, Hiroichi; Tyminski, Jacek K.; Lucas, Kevin

Publisher

SPIE

Published

2007

Language

EN