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Interfacial and Electrokinetic Characterization of IPA Solutions Related to Semiconductor Wafer Drying and Cleaning by Park, Jin-Goo; Lee, Sang-Ho; Ryu, Ju-Suk; Hong, Yi-Koan; Kim, Tae-Gon; Busnaina, Ahmed A. is a Engineering article available to read on EtoBox.
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- Author
- Park, Jin-Goo; Lee, Sang-Ho; Ryu, Ju-Suk; Hong, Yi-Koan; Kim, Tae-Gon; Busnaina, Ahmed A.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 2006
- Field
- Engineering (Physical Sciences)