About this scholarly article

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Nano- and Micro-Metrology - Non-destructive optical system based on digital holographic microscope for quasi real-time characterization of micromechanical shunt switch by Striano, Valerio; Ottevaere, Heidi; DeWolf, Peter; Coppola, Giuseppe; Ferraro, Pietro; Wiersma, Diederik S.; Alfieri, Domenico; De Nicola, Sergio; Finizio, Andrea; Pierattini, Giovanni; Marcelli, Romolo; Mezzanotte, Paolo is a scholarly article available to read on EtoBox.

Author

Striano, Valerio; Ottevaere, Heidi; DeWolf, Peter; Coppola, Giuseppe; Ferraro, Pietro; Wiersma, Diederik S.; Alfieri, Domenico; De Nicola, Sergio; Finizio, Andrea; Pierattini, Giovanni; Marcelli, Romolo; Mezzanotte, Paolo

Publisher

SPIE

Published

2005