Opening book details…
About this Engineering article
Interferometric Fabrication of Modulated Submicrometer Gratings in Photoresist by Ehbets, Peter; Herzig, Hans Peter; Nussbaum, Philippe; Blattner, Peter; ndliker, René Dä is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ehbets, Peter; Herzig, Hans Peter; Nussbaum, Philippe; Blattner, Peter; ndliker, René Dä
- Publisher
- The Optical Society; Optical Society of America (ISSN 1559-128X)
- Published
- 1995
- Language
- EN
- Field
- Engineering (Physical Sciences)