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About this Engineering article

Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments by S. Necipoglu; S.A. Cebeci; C. Basdogan; Y.E. Has; L. Guvenc is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
S. Necipoglu; S.A. Cebeci; C. Basdogan; Y.E. Has; L. Guvenc
Publisher
Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0957-4158)
Published
2011
Language
EN
Field
Engineering (Physical Sciences)