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About this Engineering article
Attempt Of Target Slanting On Facing Targets Sputtering System by NAGAKUBO, Masao; HIRATA, Toyoaki; MUROI, Hironobu; NAOE, Masahiko is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- NAGAKUBO, Masao; HIRATA, Toyoaki; MUROI, Hironobu; NAOE, Masahiko
- Publisher
- The Magnetics Society of Japan (ISSN 0285-0192)
- Published
- 1991
- Field
- Engineering (Physical Sciences)
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