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About this scholarly article
SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - Measurements of fracture strength and Young's modulus of surface-micromachined polysilicon by Read, David T.; Marshall, Janet C.; Postek, Jr., Michael T.; Friedrich, Craig R. is a scholarly article available to read on EtoBox.
- Author
- Read, David T.; Marshall, Janet C.; Postek, Jr., Michael T.; Friedrich, Craig R.
- Publisher
- SPIE
- Published
- 1996
- Language
- EN
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