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About this Engineering article
Influence of substrate temperature on the formation of buried oxide and surface crystallinity during high dose oxygen implantation into Si by Holland, O. W.; Sjoreen, T. P.; Fathy, D.; Narayan, J. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Holland, O. W.; Sjoreen, T. P.; Fathy, D.; Narayan, J.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1984
- Language
- EN
- Field
- Engineering (Physical Sciences)
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