About this scholarly article

Proceedings. SOS/SOI Technology Workshop - Comparison of fabrication methods for bonded wafer SOI by Delgado, J.A.; Rouse, G.V.; McLachlan, C.J.; Gaul, S.J. is a scholarly article available to read on EtoBox.

Author

Delgado, J.A.; Rouse, G.V.; McLachlan, C.J.; Gaul, S.J.

Publisher

IEEE

Published

1988

Language

EN