About this scholarly article

2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Advances in atomic level deposition technologies by Seidel, Tom; Dalton, Jeremie; Karim, Zia; Lindner, Johannes; Daulesberg, Martin; Zhang, Wei is a scholarly article available to read on EtoBox.

Author

Seidel, Tom; Dalton, Jeremie; Karim, Zia; Lindner, Johannes; Daulesberg, Martin; Zhang, Wei

Publisher

IEEE

Published

2006