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Effect of ethylenediamine on CMP performance of ruthenium in H2O2-based slurries by Yi Xu & Tengda Ma & Yuling Liu & Baimei Tan & Shihao Zhang & Yazhen Wang & Guoqiang Song is a book available to read on EtoBox.

Author
Yi Xu & Tengda Ma & Yuling Liu & Baimei Tan & Shihao Zhang & Yazhen Wang & Guoqiang Song
Publisher
Royal Society of Chemistry
Language
EN

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