About this scholarly article

SPIE Proceedings [SPIE 1984 Microlithography Conferences - Santa Clara (Monday 12 March 1984)] Advances in Resist Technology I - Novel, Negative-Working Electron-Beam Resist by Tan, Z. C.; Daly, R. C.; Georgia, S. S.; Willson, C. Grant is a scholarly article available to read on EtoBox.

Author

Tan, Z. C.; Daly, R. C.; Georgia, S. S.; Willson, C. Grant

Publisher

SPIE

Published

1984

Language

EN