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The study investigates the electronic structure of Cu3N films using soft x-ray spectroscopy, focusing on films synthesized via atomic layer deposition (ALD) and chemical vapor deposition (CVD) at varying temperatures. The findings indicate that films grown in copper-rich environments above approximately 360°C exhibit increased copper-enriched areas, while those below this temperature do not. The experimental results are supported by theoretical calculations of the electronic structure, demonstrating a good
- Author
- u2002117
- Language
- EN