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Thermal Stability of High k Layers by Zhao, C.; Cosnier, V.; Chen, P. J.; Richard, O.; Roebben, G.; Maes, J.; Van Elshocht, S.; Bender, H.; Young, E; Van Der Biest, O.; Caymax, M.; Vandervorst, W.; De Gendt, S.; Heyns, M. is a Engineering article available to read on EtoBox.

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Author
Zhao, C.; Cosnier, V.; Chen, P. J.; Richard, O.; Roebben, G.; Maes, J.; Van Elshocht, S.; Bender, H.; Young, E; Van Der Biest, O.; Caymax, M.; Vandervorst, W.; De Gendt, S.; Heyns, M.
Publisher
Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
Published
2002
Language
EN
Field
Engineering (Physical Sciences)

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