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About this Engineering article
Pre-amorphization Damage in Ion-implanted Silicon by Schreutelkamp, R.J.; Custer, J.S.; Liefting, J.R.; Lu, W.X.; Saris, F.W. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Schreutelkamp, R.J.; Custer, J.S.; Liefting, J.R.; Lu, W.X.; Saris, F.W.
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0920-2307)
- Published
- 1991
- Language
- EN
- Field
- Engineering (Physical Sciences)
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