About this scholarly article

Extended Abstracts of International Workshop on Gate Insulator. IWGI 2001 (IEEE Cat. No.01EX537) - Electrical characterisation of high-k materials prepared by atomic layer CVD by Carter, R.J.; Cartier, E.; Caymax, M.; De Gendt, S.; Degraevel R, ; Groeseneken, G.; Heyns, M.; Kauerauf, T.; Kerber, A.; Kubicek, S.; Lujan, G.; Pantisano, L.; Tsai, W.; Young, E. is a scholarly article available to read on EtoBox.

Author

Carter, R.J.; Cartier, E.; Caymax, M.; De Gendt, S.; Degraevel R, ; Groeseneken, G.; Heyns, M.; Kauerauf, T.; Kerber, A.; Kubicek, S.; Lujan, G.; Pantisano, L.; Tsai, W.; Young, E.

Publisher

Japan Soc. Appl. Phys

Published

2001