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Can I read Excimer Laser Lithography on EtoBox?
Excimer Laser Lithography by Jain, Kanti, 1948- is a engineering available to read on EtoBox.
What is Excimer Laser Lithography about?
This book provides an overview of the rapidly emerging technology of excimer laser lithography. Topics covered include current nonexcimer submicrometer optical lithography technology and its limitations, fundamentals of excimer lasers and relevant optical components, excimer laser exposure tool concepts and system requirements, alignment techniques, and resists for excimer laser lithography. The current status of practical implementation of this technology in industry as well as in discussion of the outlook for the future are also presented
Who reads Excimer Laser Lithography?
It is typically read by working professionals who need an authoritative practice reference.
Common subject areas: medicine, law, business, engineering.
- Author
- Jain, Kanti, 1948-
- Publisher
- Bellingham, WA (USA); SPIE Society of Photo-Optical Instrumentation Engineers
- Published
- 1990
- Language
- EN
- ISBN
- 9780819402714
- Category
- engineering
- Subjects
- Engineering, Technology & Engineering, Stem
- Updated
- 2026-03-25