Opening book details…
About this Engineering article
Maskless nano-implant of 20keV Ga+ in bulk Si(100) substrates by Milazzo, R.G.; D’Arrigo, G.; Mio, A.M.; Rimini, E.; Spinella, C.; Peto, L.; Nadzeyka, A.; Bauerdick, S. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Milazzo, R.G.; D’Arrigo, G.; Mio, A.M.; Rimini, E.; Spinella, C.; Peto, L.; Nadzeyka, A.; Bauerdick, S.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 2014
- Language
- EN
- Field
- Engineering (Physical Sciences)