Opening book details…
About this Engineering article
Hard Plasma Chemical Coatings Based on Silicon Carbon Nitride by L. A. Ivashchenko; V. I. Ivashchenko; O. K. Porada; S. M. Dub; P. L. Skrinskii; M. V. Ushakov; M. V. Karpets; A. I. Stegnii; L. A. Grishnova is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- L. A. Ivashchenko; V. I. Ivashchenko; O. K. Porada; S. M. Dub; P. L. Skrinskii; M. V. Ushakov; M. V. Karpets; A. I. Stegnii; L. A. Grishnova
- Publisher
- Springer; Springer-Verlag; Kluwer Academic/Plenum Publishers; Springer Science and Business Media LLC (ISSN 1573-9066)
- Published
- 2007
- Language
- EN
- Field
- Engineering (Physical Sciences)