About this Engineering article
Nitridation of High-purity Silicon by A. Atkinson; A. J. Moulson; E. W. Roberts is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- A. Atkinson; A. J. Moulson; E. W. Roberts
- Publisher
- Springer; Springer-Verlag; Kluwer Academic Publishers; Springer Science and Business Media LLC; Society for Mining, Metallurgy and Exploration Inc. (ISSN 0022-2461)
- Published
- 1975
- Language
- EN
- Field
- Engineering (Physical Sciences)