Opening book details…
About this Engineering article
Review—Ruthenium as Diffusion Barrier Layer in Electronic Interconnects: Current Literature with a Focus on Electrochemical Deposition Methods by Bernasconi, R. (author);Magagnin, L. (author) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Bernasconi, R. (author);Magagnin, L. (author)
- Publisher
- The Electrochemical Society
- Published
- 2018
- Field
- Engineering (Physical Sciences)
More by Bernasconi, R. (author);Magagnin, L. (author)
Browse all works by Bernasconi, R. (author);Magagnin, L. (author)