Opening book details…
About this Engineering article
Processing of Nanoscale Gaps for Boron-doped Nanocrystalline Diamond Based MEMS by Iankov, Dimitre; Zuerbig, Verena; Pletschen, Wilfried; Giese, Christian; Iannucci, Robert; Ambacher, Oliver; Lebedev, Vadim is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Iankov, Dimitre; Zuerbig, Verena; Pletschen, Wilfried; Giese, Christian; Iannucci, Robert; Ambacher, Oliver; Lebedev, Vadim
- Publisher
- Elsevier ; [Oxford]: Elsevier Ltd.; Elsevier BV (ISSN 1877-7058)
- Published
- 2014
- Language
- EN
- Field
- Engineering (Physical Sciences)