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About this Materials Science article

Deposition of hydrogenated amorphous silicon-carbon films by vacuum ultraviolet photo-CVD by Tadashi Fujii; Masahiro Yoshimoto; Takashi Fuyuki; Hiroyuki Matsunami is a Materials Science article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Materials Science.

Author
Tadashi Fujii; Masahiro Yoshimoto; Takashi Fuyuki; Hiroyuki Matsunami
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
Published
1994
Language
EN
Field
Materials Science (Physical Sciences)