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The PAS 5500 series includes various advanced lithography systems designed for mass production across multiple technology nodes, including 90-nm, 110-nm, and 130-nm processes. Each system features specific configurations, such as variable numerical apertures and advanced illumination technologies, to enhance resolution and throughput. Key models include the PAS 5500/1150C for 90-nm production, the PAS 5500/850C for 110-nm applications, and the PAS 5500/750F for 130-nm production, each offering unique specif
- Author
- habibi123456789bibi
- Language
- EN