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About this Materials Science article
Effect of substrate temperature and bias voltage on the properties in DC magnetron sputtered AlN films on glass substrates by Wang, J.; Zhang, Q.; Yang, G. F.; Yao, C. J.; Li, Y. J.; Sun, R.; Zhao, J. L.; Gao, S. M. is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Wang, J.; Zhang, Q.; Yang, G. F.; Yao, C. J.; Li, Y. J.; Sun, R.; Zhao, J. L.; Gao, S. M.
- Publisher
- Springer US; Springer-Verlag; Kluwer Academic Publishers; Springer Science and Business Media LLC; Society for Mining, Metallurgy and Exploration Inc. (ISSN 0957-4522)
- Published
- 2015
- Language
- EN
- Field
- Materials Science (Physical Sciences)