About this scholarly article

2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Compact roll-pitch-yaw gyroscope implemented in wafer-level Epitaxial Silicon Encapsulation process by Efimovskaya, Alexandra; Yushi Yang, ; Ng, Eldwin; Yunhan Chen, ; Flader, Ian; Kenny, Thomas W.; Shkel, Andrei M. is a scholarly article available to read on EtoBox.

Author

Efimovskaya, Alexandra; Yushi Yang, ; Ng, Eldwin; Yunhan Chen, ; Flader, Ian; Kenny, Thomas W.; Shkel, Andrei M.

Publisher

IEEE

Published

2017