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About this Engineering article
Investigation of interface trap states in TiN/Al[sub 2]O[sub 3]/p-Si capacitor by deep level transient spectroscopy by Jeon, In Sang; Park, Jaehoo; Eom, Dail; Hwang, Cheol Seong; Kim, Hyeong Joon; Park, Chan Jin; Cho, Hoon Young; Lee, Jong-Ho; Lee, Nae-In; Kang, Ho-Kyu is a Engineering article available to read on EtoBox.
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- Author
- Jeon, In Sang; Park, Jaehoo; Eom, Dail; Hwang, Cheol Seong; Kim, Hyeong Joon; Park, Chan Jin; Cho, Hoon Young; Lee, Jong-Ho; Lee, Nae-In; Kang, Ho-Kyu
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2003
- Language
- EN
- Field
- Engineering (Physical Sciences)