About this scholarly article

SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Advances in Resist Technology and Processing XI - Synthesis and patterning of 2 to 10-nm pinhole-free organic films by Gorwadkar, Sucheta; Vinogradov, G. K.; Senda, K.; Inanami, Ryoichi; Shao, C.; Morita, Shinzo; Nalamasu, Omkaram is a scholarly article available to read on EtoBox.

Author

Gorwadkar, Sucheta; Vinogradov, G. K.; Senda, K.; Inanami, Ryoichi; Shao, C.; Morita, Shinzo; Nalamasu, Omkaram

Publisher

SPIE

Published

1994