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About this Engineering article
Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching by Morgan, B.; Waits, C.M.; Krizmanic, J.; Ghodssi, R. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Morgan, B.; Waits, C.M.; Krizmanic, J.; Ghodssi, R.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1057-7157)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)
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