About this scholarly article

1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - The development of a beam line using an RFQ and 3-Gap RF accelerators for high energy ion implanter by Fujisawa, H.; Hamamoto, N.; Nishigami, Y.; Miyabayashi, K.; Haseme, T.; Inouchi, Y.; Okuda, S.; Fujita, H.; Yamahara, N.; Naito, M. is a scholarly article available to read on EtoBox.

Author

Fujisawa, H.; Hamamoto, N.; Nishigami, Y.; Miyabayashi, K.; Haseme, T.; Inouchi, Y.; Okuda, S.; Fujita, H.; Yamahara, N.; Naito, M.

Publisher

IEEE

Published

1998