About this scholarly article

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida, United States (Monday 25 April 2011)] Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences - Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM by Postek, Michael T.; Korpelainen, V.; Seppä, J.; Newbury, Dale E.; Platek, S. Frank; Lassila, A.; Joy, David C.; Maugel, Tim K. is a scholarly article available to read on EtoBox.

Author

Postek, Michael T.; Korpelainen, V.; Seppä, J.; Newbury, Dale E.; Platek, S. Frank; Lassila, A.; Joy, David C.; Maugel, Tim K.

Publisher

SPIE

Published

2011

Language

EN