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About this Engineering article
Detection of the Defects Induced by Boron High-Energy Ion Implantation of Silicon by Hsu, Wei-Cheng; Chen, Mao-Chieh; Liang, Mong-Song is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Hsu, Wei-Cheng; Chen, Mao-Chieh; Liang, Mong-Song
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 2000
- Field
- Engineering (Physical Sciences)
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