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About this Materials Science article
Etch characteristics of Pt by using BCl3/Cl2-gas mixtures by Kwang-Ho Kwon; Seung-Youl Kang; Sung-Ihl Kim; Nam-Kwan Hong is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Kwang-Ho Kwon; Seung-Youl Kang; Sung-Ihl Kim; Nam-Kwan Hong
- Publisher
- Springer US; Springer-Verlag; Kluwer Academic Publishers; Springer Science and Business Media LLC; Society for Mining, Metallurgy and Exploration Inc. (ISSN 0957-4522)
- Published
- 2002
- Language
- EN
- Field
- Materials Science (Physical Sciences)
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