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About this Materials Science article

Etch characteristics of Pt by using BCl3/Cl2-gas mixtures by Kwang-Ho Kwon; Seung-Youl Kang; Sung-Ihl Kim; Nam-Kwan Hong is a Materials Science article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Materials Science.

Author
Kwang-Ho Kwon; Seung-Youl Kang; Sung-Ihl Kim; Nam-Kwan Hong
Publisher
Springer US; Springer-Verlag; Kluwer Academic Publishers; Springer Science and Business Media LLC; Society for Mining, Metallurgy and Exploration Inc. (ISSN 0957-4522)
Published
2002
Language
EN
Field
Materials Science (Physical Sciences)

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