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About this Engineering article
Development of a Two-dimensional Phase-grating Mask for Fabrication of an Analog-resist Profile by Sung, Jin Won ;Hockel, Heidi ;Brown, Jeremiah D. ;Johnson, Eric G. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Sung, Jin Won ;Hockel, Heidi ;Brown, Jeremiah D. ;Johnson, Eric G.
- Publisher
- The Optical Society; Optical Society of America (ISSN 1559-128X)
- Published
- 2006
- Field
- Engineering (Physical Sciences)
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