About this scholarly article

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Tip integration on arrays of silicon micro cantilevers with self exciting piezoelectric sensor for parallel atomic force microscopy applications by Indermuhle, P.-F.; Schurmann, G.; Racine, G.-A.; de Rooij, N.F. is a scholarly article available to read on EtoBox.

Author

Indermuhle, P.-F.; Schurmann, G.; Racine, G.-A.; de Rooij, N.F.

Publisher

IEEE

Published

1997

Language

EN