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About this Engineering article
Short Channel Effects in N- and P-Channel Polycrystalline Silicon Thin Film Transistors with Very Thin Electron Cyclotron Resonance N 2 O-Plasma Gate Dielectric by Lee, Jin-Woo; Lee, Nae-In; Han, Chul-Hi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Lee, Jin-Woo; Lee, Nae-In; Han, Chul-Hi
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)