About this scholarly article

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 17 August 2014)] Advances in Metrology for X-Ray and EUV Optics V - Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration by Assoufid, Lahsen; Ohashi, Haruhiko; Asundi, Anand K.; Shu, D.; Qian, J.; Liu, W.; Kearney, S.; Anton, J.; Sullivan, J.; Assoufid, L. is a scholarly article available to read on EtoBox.

Author

Assoufid, Lahsen; Ohashi, Haruhiko; Asundi, Anand K.; Shu, D.; Qian, J.; Liu, W.; Kearney, S.; Anton, J.; Sullivan, J.; Assoufid, L.

Publisher

SPIE

Published

2014