About this scholarly article

ESSDERC 2007 - 37th European Solid State Device Research Conference - Low resistive tungsten dual polymetal gate process for high speed and high density memory devices by Yong Soo Kim, ; Kwan-Yong Lim, ; Min-Gyu Sung, ; Soo-Hyun Kim, ; Hong-Seon Yang, ; Heung-Jae Cho, ; Se-Aug Jang, ; Jae-Geun Oh, ; Kwangok Kim, ; Young-Kyun Jung, ; Tae-Woo Jung, ; Choon-Hwan Kim, ; Doek-Won Lee, ; Won Kim, ; Young-Hoon Kim, ; Kang-Sik Choi, ; Tae-Kyung Oh, ; Yun-Taek Hwang, ; Seung-Ho Pyi, ; Ja-chun Ku, ; Jin-Woong Kim, is a scholarly article available to read on EtoBox.

Author

Yong Soo Kim, ; Kwan-Yong Lim, ; Min-Gyu Sung, ; Soo-Hyun Kim, ; Hong-Seon Yang, ; Heung-Jae Cho, ; Se-Aug Jang, ; Jae-Geun Oh, ; Kwangok Kim, ; Young-Kyun Jung, ; Tae-Woo Jung, ; Choon-Hwan Kim, ; Doek-Won Lee, ; Won Kim, ; Young-Hoon Kim, ; Kang-Sik Choi, ; Tae-Kyung Oh, ; Yun-Taek Hwang, ; Seung-Ho Pyi, ; Ja-chun Ku, ; Jin-Woong Kim,

Publisher

IEEE

Published

2007

Language

EN