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Development and Characterization of Electrochemically Enlarged Silicon Electrodes for Energy Storage Microcapacitors by A. Sancho; N. Pérez; J. Gracia is a Engineering article available to read on EtoBox.

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## Abstract Focused on the development of high capacitance silicon‐based devices, an optimized anodization method has been carried out in order to obtain electrodes with a greatly enlarged area. This constitutes a first structural condition to maximize the charge storage density of the capacitor. According to this purpose, the macropore formation on P and N type substrates has been analyzed and contrasted. For this task, the deposition parameters of a transparent Indium Tin Oxide (ITO) layer on N‐type silicon have been established to ensure a conductive ohmic contact. Furthermore, the crystalline structure and transparency of the film have been demonstrated. This allows an efficient electron‐hole generation by illuminating the back side of the wafer. Referring the P‐type substrates, the effect of the applied current density in the superficial porosity and the macropore formation rate has been measured. A subsequent doping process of the macroporous structure by the use of a planar diffusion source has been performed to guarantee its low series resistance. In order to demonstrate the feasibility and mechanical robustness of the intended capacitance structure, a dielectric layer and

Who reads Development and Characterization of Electrochemically Enlarged Silicon Electrodes for Energy Storage Microcapacitors?

Author

A. Sancho; N. Pérez; J. Gracia

Publisher

John Wiley and Sons; Wiley (John Wiley & Sons); Wiley - V C H Verlag GmbbH & Co.; Wiley (ISSN 1862-6351)

Published

2008

Language

EN

Field

Engineering (Physical Sciences)