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SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Design, Characterization, and Packaging for MEMS and Microelectronics - Novel design of a MEMS-based tactile sensor by Singh, Ranjit; Courtois, Bernard; Demidenko, Serge N. is a scholarly article available to read on EtoBox.

Author
Singh, Ranjit; Courtois, Bernard; Demidenko, Serge N.
Publisher
SPIE
Published
1999

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