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About this Materials Science article
Direct photoetching of single crystal SiC by VUV-266 by J. Zhang; K. Sugioka; S. Wada; H. Tashiro; K. Toyoda is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- J. Zhang; K. Sugioka; S. Wada; H. Tashiro; K. Toyoda
- Publisher
- Springer; Springer-Verlag; Springer Verlag; Springer Science and Business Media LLC (ISSN 1432-0630)
- Published
- 1997
- Language
- EN
- Field
- Materials Science (Physical Sciences)
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