About this scholarly article

1986 International Electron Devices Meeting - Selective CVD tungsten via plugs for multilevel metallization by Brown, D.M.; Gorowitz, B.; Piacente, P.A.; Saia, R.J.; Wilson, R.H.; Woodruff, D.W. is a scholarly article available to read on EtoBox.

Author

Brown, D.M.; Gorowitz, B.; Piacente, P.A.; Saia, R.J.; Wilson, R.H.; Woodruff, D.W.

Publisher

IRE

Published

1986

Language

EN