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About this Engineering article
Improved electron beam pattern writing in SiO2 with the use of a sample heating stage by Pan, Xiaodan; Broers, Alec N. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Pan, Xiaodan; Broers, Alec N.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1993
- Language
- EN
- Field
- Engineering (Physical Sciences)