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About this Engineering article

Fabrication of thin film transistors using a Si/Si/sub 1-x/Ge/sub x//Si triple layer film on a SiO2 substrate by Jin Hyeok Kim; Jeong Yong Lee; Hong Seung Kim; Yoon-ho Song; Kee-soo Nam is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Jin Hyeok Kim; Jeong Yong Lee; Hong Seung Kim; Yoon-ho Song; Kee-soo Nam
Publisher
IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0741-3106)
Published
1996
Language
EN
Field
Engineering (Physical Sciences)

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