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About this Engineering article
SIMS analysis of thermal and ion-beam induced broadening of thin metal markers in silicon by D.G. Tonn; O.F. Sankey; I.S.T. Tsong is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- D.G. Tonn; O.F. Sankey; I.S.T. Tsong
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 1986
- Language
- EN
- Field
- Engineering (Physical Sciences)