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About this Engineering article
High Sensitivity of Fluorine Gas-Assisted FIB-TOF-SIMS for Chemical Characterization of Buried Sublayers in Thin Films by Priebe, Agnieszka (author);Pethö, Laszlo (author);Huszar, Emese (author);Xie, Tianle (author);Utke, Ivo (author);Michler, Johann (author) is a Engineering article available to read on EtoBox.
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- Author
- Priebe, Agnieszka (author);Pethö, Laszlo (author);Huszar, Emese (author);Xie, Tianle (author);Utke, Ivo (author);Michler, Johann (author)
- Publisher
- American Chemical Society (ACS)
- Published
- 2021
- Field
- Engineering (Physical Sciences)