About this scholarly article

SPIE Proceedings [SPIE SPIE LASE: Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 24 January 2009)] Laser-based Micro- and Nanopackaging and Assembly III - Micro-scale large-area UV laser processing by Herbst, Ludolf; Brune, Jan; Pfleging, Wilhelm; Lu, Yongfeng; Washio, Kunihiko; Hoving, Willem; Amako, Jun is a scholarly article available to read on EtoBox.

Author

Herbst, Ludolf; Brune, Jan; Pfleging, Wilhelm; Lu, Yongfeng; Washio, Kunihiko; Hoving, Willem; Amako, Jun

Publisher

SPIE

Published

2009

Language

EN