Can I read An Integrable Nozzle for Monolithic Microfluidic Devices on EtoBox?

An Integrable Nozzle for Monolithic Microfluidic Devices by Jafar Haji Babaei; Chee Yee Kwok; Ruey Shing Huang is a Engineering article available to read on EtoBox.

What is An Integrable Nozzle for Monolithic Microfluidic Devices about?

A novel nozzle structure, applicable as part of an integrated microfluidic system, has been fabricated in a < 100) silicon wafer, using doubleside bulk-silicon micromachining. The nozzle structure contains three pyramidal channels in tandem with a square orifice which is the result of anisotropic etching in a bulk silicon wafer. A time-controlled anisotropic etching procedure is employed to realize such nozzles, which have been designed for orifice sizes of 15 p~m × 15 p,m and 60 p~m x 60 p,m. A combination of KOH and EDP etching processes maximizes the process latitudes for controlling the orifice size. Gas-flow measurement of the fabricated nozzle having an orifice size of 15 p~m X 15 Ixm shows a linear relationship between flow rate and pressure difference within the measured ranges of 0-7 ccm min-~ and 0-80 psi.

Who reads An Integrable Nozzle for Monolithic Microfluidic Devices?

Author

Jafar Haji Babaei; Chee Yee Kwok; Ruey Shing Huang

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)

Published

1998

Language

EN

Field

Engineering (Physical Sciences)