About this scholarly article

SPIE Proceedings [SPIE 1989 Microlithography Conferences - San Jose, CA (Monday 27 February 1989)] Optical/Laser Microlithography II - Lithographic Replication Of Compact Disk Structures by Revay, Robert E.; Briaud, Philippe; Lin, Burn J. is a scholarly article available to read on EtoBox.

Author

Revay, Robert E.; Briaud, Philippe; Lin, Burn J.

Publisher

SPIE

Published

1989

Language

EN