Can I read A Micro Plasma Reactor for Fluorinated Waste Gas Treatment on EtoBox?

A Micro Plasma Reactor for Fluorinated Waste Gas Treatment by P Sichler; S Büttgenbach; L Baars-Hibbe; C Schrader; K.-H Gericke is a Engineering article available to read on EtoBox.

What is A Micro Plasma Reactor for Fluorinated Waste Gas Treatment about?

A microreactor based on a micro-structured electrode (MSE) system is presented. With radio frequency electric power applied to the interdigitated, comb-like capacitor structure a homogeneous plasma is driven at atmospheric pressure with low ignition voltages due to small electrode gaps. The MSE is micromachined by plating nickel onto alumina ceramics. A micromachined Foturan ® structure with inlet and outlet channels for the gas flow serves as a reaction chamber. The design of the reactor cell is arranged in a 4 × 4-array in a multireactor system. The performance of the reactor is modeled with computational fluid dynamics (CFD), used to improve the reactor design. Experiments show that CF 4 decomposition rates of over 70% can be achieved at atmospheric pressure.

Who reads A Micro Plasma Reactor for Fluorinated Waste Gas Treatment?

Author

P Sichler; S Büttgenbach; L Baars-Hibbe; C Schrader; K.-H Gericke

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 1385-8947)

Published

2004

Language

EN

Field

Engineering (Physical Sciences)